基于音圈电机的低频伺服加速度传感器设计与分析  

Design and Analysis of Low Frequency Servo Acceleration Sensor Based on Voice Coil Motor

作　　者：刘彦莹 周振华[1] 刘志强[1] 刘鑫[1] 戴志辉 LIU Yanying;ZHOU Zhenhua;LIU Zhiqiang;LIU Xin;DAI Zhihui(School of Automotive and Mechanical Engineering,Changsha University of Science and Technology)

机构地区：[1]长沙理工大学汽车与机械工程学院

出　　处：《仪表技术与传感器》2024年第12期29-35,54,共8页Instrument Technique and Sensor

基　　金：湖南省自然科学基金(2021JJ30731);长沙市自然科学基金(kq2014099)。

摘　　要：加速度传感器的测量上限受制于其固有频率,为提高传感器测量性能,设计了一种基于音圈电机控制的加速度传感器,并搭建了实验样机,通过参数辨识得知反馈控制引入了16248.35 N/m的电控刚度。对传感器样机的频率响应特性等进行了分析,得到其带宽为0~49 Hz,对2~11 Hz频率的激励信号具有良好的测量效果,其线性度为1.6%,灵敏度为1.52 V/g,分辨率为0.0015 g,量程为±0.079 g。The upper limit of acceleration sensor is limited by its natural frequency.In order to improve the measurement performance of sensor,an acceleration sensor based on voice coil motor was designed,and an experimental prototype was built.Through parameter identification,the electronic control stiffness of 16248.35 N/m was introduced by feedback control.The frequency response characteristics of the sensor prototype were analyzed.The bandwidth is 0~49 Hz,and it has a good measurement effect for the excitation signal of 2~11 Hz.The linearity is 1.6%,the sensitivity is 1.52 V/g,the resolution is 0.0015 g,and the range is±0.079 g.

关 键 词：音圈电机 低频加速度传感器 固有频率 参数辨识 反馈控制 频率特性 

分 类 号：TB52[理学—物理]