超精密定位系统音圈电机驱动器设计  

Design of Ultra-precision Positioning System Voice Coil Motor Driver

作　　者：李荣 舒鑫东 黄晓路 张驰 LI Rong;SHU Xin-dong;HUANG Xiao-lu;ZHANG Chi(Laboratory of Robotics and Intelligent Manufacturing Equipment Technology of Zhejiang Province,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 351201,China)

机构地区：[1]中国科学院宁波材料技术与工程研究所,浙江省机器人与智能制造装备技术重点实验室,浙江宁波351201

出　　处：《电力电子技术》2025年第1期17-20,共4页Power Electronics

基　　金：中国科学院国际合作局重点项目(174433KYSB-20210060);宁波市自然科学基金(2022J315)。

摘　　要：基于柔顺并联机构的音圈电机驱动装置是超精密定位系统实现大行程、高动态、超精密定位的核心部件,要求电机电流驱动器可实现跨尺度电流输出能力,即微安级到安培级。本文针对以上要求,设计了一种具有高电流环带宽、高电流分辨力的驱动器。首先,建立了驱动系统考虑电机负载参数的数学模型,并分析了系统的稳定性;其次,基于遗传算法优化了驱动器电路参数,提高了电流环带宽;最后,采用音圈电机驱动的单轴纳米定位平台搭建了实时仿真控制系统,测试了驱动器带宽、电流输出能力、定位平台的定位性能。通过实验验证了设计思路和理论模型的正确性。The voice coil motor drive unit,incorporating a compliant parallel mechanism,serves as the core component of ultra-precision positioning systems,enabling large travel,high dynamics,and ultra-precision positioning.The motor current driver must posses the capacity to produce current across a wide scale range from microamperes to amperes.In alignment with these demands,a driver design with high bandwidth is proposed for the current loop and high current resolution.Initially,a mathematical model of the drive system considering the motor load parameters is established with an analysis of the stability of the system.Subsequently,the circuit parameters of the driver are refined through opti-mization using the genetic algorithm,thereby enhancing the current loop bandwidth.Ultimately,a real-time simulation control system is constructed utilizing a uniaxial nanopositioning platform driven by a voice coil motor.This system is employed to evaluate the driver’s bandwidth,current output capability,and the positioning performance of the platform.Experimental results affirm the accuracy of the design concept and the validity of the theoretical model presented.

关 键 词：音圈电机 电流驱动器 电流环 超精密定位 

分 类 号：TM302[电气工程—电机]