集成电路制造装备运动系统LPV动力学建模与控制综述  

A Review of LPV Dynamic Modeling and Control for Integrated Circuit Manufacturing Equipment Motion System

作　　者：黄涛[1,2] 于春运 陈宏枢 鲁森 Huang Tao;Yu Chunyun;Chen Hongshu;Lu Sen(College of Mechanical and Vehicle Engineering,Chongqing University,Chongqing 400044,China;State Key Laboratory of Mechanical Transmission for Advanced Equipment,Chongqing University,Chongqing 400044,China;National Elite Institute of Engineering,Chongqing University,Chongqing 400044,China;Mechanical Engineering Department,Tsinghua University,Beijing 100084,China)

机构地区：[1]重庆大学机械与运载工程学院,重庆400044 [2]重庆大学高端装备机械传动全国重点实验室,重庆400044 [3]重庆大学国家卓越工程师学院,重庆400044 [4]清华大学机械工程系,北京100084

出　　处：《动力学与控制学报》2024年第12期5-17,共13页Journal of Dynamics and Control

基　　金：国家自然科学基金资助项目(52475510,52105578);中央高校基本科研业务费资助项目(2023CDJKYJH035)。

摘　　要：运动系统是实现集成电路制造装备高速、高精度、强稳定性运动的核心子系统.随着集成电路制造领域对性能与生产效率要求的不断提升,集成电路制造装备运动系统应具备极高的精度、迅速的响应能力,以及优异的稳定性和鲁棒性.而集成电路制造装备运动系统存在的多自由度和刚柔耦合特性、非线性和时变动力学特性、测量噪声和参数不确定性等问题,对集成电路制造装备运动系统动力学建模与控制带来严峻挑战,线性变参数(Linear Parameter-Varying,LPV)理论为上述问题的解决提供了新方案.本文首先简要概述集成电路制造装备运动系统及其建模与控制问题,其次从建模、辨识、控制三个方面综述集成电路制造装备运动系统LPV建模与控制方法及其应用,最后对集成电路制造装备动力学建模与控制研究进行总结与展望.Motion system is the core subsystem of integrated circuit(IC)manufacturing equipment for achieving high-speed,high-precision,and strong stability.With increasing performance and production efficiency requirements of IC manufacturing,the motion system of IC manufacturing equipment should have extremely high precision,high response speed,as well as strong excellent robustness and stability.However,its dynamic modeling and control was seriously challenged by the multi-degree-of-freedom and rigid-flexible coupling characteristics,nonlinear and time-varying dynamic characteristics,measurement noise,and parameter uncertainty.The linear parameter-varying(LPV)theory provides a new solution approach to the above problems,this paper briefly surveys the motion system of IC manufacturing equipment and its modeling and control problems.Secondly,it reviews the LPV modeling and control methods of the motion system of IC manufacturing equipment from the three aspects of modeling,identification,and control.Finally,it summarizes and prospects the research on dynamic modeling and control of IC manufacturing equipment motion system.

关 键 词：集成电路制造装备 高精度运动系统 线性变参数 动力学建模 运动控制 

分 类 号：TP13[自动化与计算机技术—控制理论与控制工程]