面向二维轨迹跟踪的精密运动台定量反馈交叉耦合控制方法  

A Quantitative Feedback Cross-Coupling Control Method for Precision Motion Stages Oriented to Two-Dimensional Trajectory Tracking

作　　者：高殿淳 黄嘉聪 吴锡鹏 宋法质 Gao Dianchun;Huang Jiacong;Wu Xipeng;Song Fazhi(Institute of Ultra-Precision Optoelectronic Instrumentation Engineering,Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨150001

出　　处：《动力学与控制学报》2024年第12期37-44,共8页Journal of Dynamics and Control

基　　金：国家自然科学基金资助项目(52375530)。

摘　　要：高端制造业中对零件精度的需求逐级提高,衍生出高精度轮廓控制的需求,双轴精密运动平台由于其结构刚度高,控制频宽等优点,被广泛应用于数控设备中.本文首先基于双轴运动台的动力学模型,为解耦后的单轴系统设计了前馈反馈相结合的复合控制方法.其次基于切线逼近的轮廓误差模型,对交叉耦合控制策略的框图进行求解,获得了有无交叉耦合控制器的轮廓误差传递函数,并建立了等效反馈回路.再次,分别使用PID调试与定量反馈的方法为时变等效受控对象设计了交叉耦合控制器,并验证定量反馈交叉耦合控制器满足了设计条件.最后通过输入不同参考轨迹,仿真验证定量反馈交叉耦合控制相较于PID型交叉耦合控制在轨迹跟踪性能和适应不同轨迹的优越性.The demand for part accuracy in high-end manufacturing is increasing steadily,thereby driving the demand for high-precision contour control.The dual-axis precision motion stage is widely used in CNC equipment due to its advantages of high structural rigidity and wide control frequency.In this paper,we first present a composite control method combining feed-forward and feedback for a decoupled single-axis system based on the dynamics model of the dual-axis motion stage.Secondly,the contour error model of tangent approximation is employed to solve the block diagram of the cross-couped control strategy,thereby obtaining the contour error transfer function with or without cross-coupling controller and establishing the equivalent feedback loop.Once more,cross-coupled controllers are designed for time-varying equivalent controlled objects using PID debugging and quantitative feedback methods,respectively.It is demonstrated that the quantitative feedback cross-coupled controllers satisfy the design conditions.Ultimately,by inputting different reference trajectories,simulation verifies the superiority of quantitative feedback cross-coupled control compared with PID-type cross-coupled control in terms of trajectory tracking performance and adaptation to different trajectories.

关 键 词：双轴运动台 轮廓控制 交叉耦合控制 定量反馈理论 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置]