VESTA软件在集成电路工艺原理教学中的应用  

Application of VESTA Software in Teaching Integrated Circuit Process Principles

作　　者：祁洋洋 毕金莲 王芳[1] 张楷亮[1] 杨正春[1] QI Yangyang;BI Jinlian;WANG Fang;ZHANG Kailiang;YANG Zhengchun(School of Integrated Circuit Science and Engineering,Tianjin University of Technology,Tianjin 300384,China)

机构地区：[1]天津理工大学集成电路科学与工程学院,天津300384

出　　处：《集成电路应用》2024年第10期52-54,共3页Application of IC

基　　金：天津市普通高等学校本科教学质量与教学改革研究计划项目(重点项目)(A231006004);天津理工大学教学基金项目(重点项目)(ZD23-06)

摘　　要：阐述绝大部分集成电路芯片的衬底材料是晶体硅,掌握硅晶体结构的特点是学习集成电路工艺原理的基础。通过列举硅的晶体结构、原子面密度、离子注入工艺的沟道效应等实例,说明VESTA软件在集成电路工艺原理教学中的应用,并探讨VESTA软件在提升教学效果方面的作用。This paper describes that the substrate material for the vast majority of integrated circuit chips is crystalline silicon,and mastering the characteristics of silicon crystal structure is the foundation for learning the principles of integrated circuit technology.It illustrates the application of VESTA software in teaching integrated circuit process principles by citing examples such as silicon crystal structure,atomic surface density,and channel effect of ion implantation technology,and explores the role of VESTA software in improving teaching effectiveness.

关 键 词：集成电路制造 VESTA软件 集成电路工艺原理 晶体结构 沟道效应 

分 类 号：TN405-4[电子电信—微电子学与固体电子学]