AZ31镁合金磁控溅射硅膜层的耐蚀性和生物相容性  

Corrosion resistance and biocompatibility of silicon film deposited on AZ31 magnesium alloy by magnetron sputtering

作　　者：张精豪 侯树森[2] 李文星[2] 张梦婷 张世坤 ZHANG Jinghao;HOU Shusen;LI Wenxing;ZHANG Mengting;ZHANG Shikun(School of Mechanical and Electrical Engineering,Xinxiang University,Xinxiang 453003,China;School of Mechanical and Electrical Engineering,Henan Institute of Science and Technology,Xinxiang 453003,China;College of Animal Science and Veterinary Medicine,Henan Institute of Science and Technology,Xinxiang 453003,China)

机构地区：[1]河南科技学院机电学院,河南新乡453003 [2]新乡学院机电工程学院,河南新乡453003 [3]河南科技学院动物科技学院,河南新乡453003

出　　处：《电镀与涂饰》2025年第2期58-63,共6页Electroplating & Finishing

摘　　要：[目的]镁合金化学性质活泼,在作为医用可降解植入材料使用时,需通过适当的表面处理来提升其耐腐蚀性和生物相容性,以满足临床应用需求。[方法]在AZ31镁合金表面磁控溅射Si薄膜,通过正交试验对工艺参数进行优化。通过表面形貌和元素组成分析、电化学测试、模拟体液浸泡腐蚀、细胞毒性试验研究了较优工艺条件下所得Si薄膜的微观结构、耐蚀性和生物相容性。[结果]在压强为0.55 Pa、功率为200 W的条件下磁控溅射3 h所得Si薄膜表面均匀致密。Si薄膜能够有效地保护镁合金,并且具有较好的生物相容性。[结论]AZ31镁合金表面磁控溅射Si薄膜可提高其耐蚀性和生物相容性。[Objective]Magnesium alloys,due to their highly reactive chemical nature,require appropriate surface treatments when used as biodegradable medical implants to enhance their corrosion resistance and biocompatibility,thereby meeting clinical application requirements.[Method]Si films were deposited on surface of AZ31 magnesium alloy by magnetron sputtering,and the process parameters were optimized through orthogonal experiments.The microstructure,corrosion resistance,and biocompatibility of Si film obtained under the optimized conditions were studied by surface morphology and elemental composition analysis,electrochemical measurement,simulated body fluid immersion corrosion test,and cytotoxicity test.[Result]The Si film deposited by magnetron sputtering for 3 hours at pressure of 0.55 Pa and power of 200 W was uniform and compact.The Si film could effectively protect the magnesium alloy and had good biocompatibility.[Conclusion]The corrosion resistance and biocompatibility of AZ31 magnesium alloy can be improved by magnetron sputtering with Si film.

关 键 词：镁合金 磁控溅射 硅薄膜 耐蚀性 生物相容性 

分 类 号：TQ153.2[化学工程—电化学工业]