离子能量对 IBAD-MgO 双轴织构的影响  

Effect of ion energy on biaxial texture of IBAD-MgO

作　　者：瞿天睿 韩超 高波 白传易 李敏娟 彭思思 周迪帆 蔡传兵 QU Tianrui;HAN Chao;GAO Bo;BAI Chuanyi;LI Minjuan;Peng Sisi;ZHOU Difan;CAI Chuanbing(Shanghai Key Laboratory of High Temperature Superconductors,College of Sciences,Shanghai University,Shanghai 200444,China;Wuhan Institute of Marine Electric Propulsion,Wuhan 430064,China)

机构地区：[1]上海大学理学院上海市高温超导重点实验室,上海200444 [2]武汉船用电力推进装置研究所,武汉430064

出　　处：《上海大学学报(自然科学版)》2025年第1期115-121,共7页Journal of Shanghai University:Natural Science Edition

基　　金：国家重点研发计划资助项目(2022YFE03150200);国家自然科学基金资助项目(52172271,52307026,52477022);上海市科技创新行动计划资助项目(23511101600)。

摘　　要：采用离子束辅助沉积(ion beam-assisted deposition,IBAD)技术在非织构的金属基带上沉积双轴织构的MgO薄膜,研究了不同Ar^(+)离子束流能量对MgO双轴织构和表面形貌的影响.结果表明:在700∼1000 eV离子能量范围内,MgO薄膜的双轴织构随离子能量的增加而改善;在1000 eV离子能量下,IBAD-MgO薄膜的面内半高全宽(full-width at half-maximum,FWHM)∆_(ϕ)和面外FWHM∆ω分别为6°和2°;随着离子能量的增加,MgO薄膜的表面形貌并无明显区别,其表面粗糙度(5µm×5µm)均方根(root mean square,RMS)均在5∼6 nm.该研究证明了较高的Ar^(+)离子束能量可以提高IBAD-MgO薄膜的织构质量,对于双轴织构薄膜的稳定制备具有重要意义.Biaxially textured MgOfilms were deposited on nontextured metal tapes via ion beam-assisted deposition(IBAD),and the effects of different ion beam energies on the biaxial texture and surface morphology of MgO were investigated.The results indicated that an increase in the ion energy in the range of 700∼1000 eV contributed to the optimization of the texture quality of IBAD-MgO.Biaxially textured MgOfilms with an in-plane full-width at half-maximum(FWHM)∆_(ϕ)and out-of-plane FWHM∆_(ω)of 6°and 2°,respectively,were obtained at 1000 eV.In addition,the surface morphology of the MgOfilms did not differ significantly with an increase in the ion energy,and the root mean square(RMS)values of surface roughness(5µm×5µm)was in the range of 5∼6 nm.This study demonstrated that a higher Ar+ion beam energy could improve the texture quality of IBAD-MgOfilms,which was important for the stable preparation of biaxially texturedfilms.

关 键 词：离子束辅助沉积 离子能量 双轴织构 

分 类 号：O469[理学—凝聚态物理]