部分相干光束聚焦的可视化实验虚拟仿真教学设计  

Visualization and Virtual Experimental Simulation Teaching Research on the Focusing of Partially Coherent Laser Beams

作　　者：万里鹏[1] 赵道木 WAN Lipeng;ZHAO Daomu(School of Physics and Materials Science,Nanchang University,Nanchang 330031,China;School of Physics,Zhejiang University,Hangzhou 310058,China)

机构地区：[1]南昌大学物理与材料学院,南昌330031 [2]浙江大学物理学院,杭州310058

出　　处：《实验室研究与探索》2025年第2期81-84,共4页Research and Exploration In Laboratory

基　　金：国家自然科学基金项目(62305146);江西省科技厅自然科学基金项目(20232BAB211031)。

摘　　要：部分相干光束聚焦对于培养学生在光刻、光学成像领域的实验能力至关重要。提出一种基于实验可视化的虚拟仿真教学方法。利用快速傅里叶变换以及相干模式叠加技术,设计实验虚拟仿真教学系统,直观地展现部分相干光束不同条件下的聚焦过程及影响因素。通过调整光束参数以及聚焦系统特性,观察聚焦光斑的光强分布以及变化。实践表明,该实验仿真突破了实验操作要求高及可调性弱的难点,可视化、互动性在实验教学中具有明显优势,可有效提高实验教学效果,增强学生对光刻及光学成像中部分相干光聚焦原理的理解。The focusing of partially coherent beams is crucial for cultivating students’experimental skills related to applications in lithography,optical imaging,and more.This paper introduces a teaching method for focusing partially coherent beams based on visualized virtual experiment simulation.By utilizing fast Fourier transform and coherent mode superposition techniques,an experimental virtual simulation teaching system was designed to intuitively demonstrate the focusing process of partially coherent beams under different conditions and their influencing factors.Students can autonomously adjust beam parametersand focusing system properties,to observe the light intensity distribution and changes of the focused spot.This enhances their understanding of the principles of partial coherence and beam focusing in photolithography and high-precision imaging.It has shown that this experimental simulation overcomes the challenges of high operational requirements and low adjustability,and its strong visualization and interactivity offer significant advantages in experimental teaching,which effectively improve the teaching outcomes and students’comprehensive qualities in partially coherent focusing within lithography and optical imaging.

关 键 词：部分相干光束 聚焦 可视化虚拟仿真 实验教学 互动式学习 

分 类 号：O436[机械工程—光学工程]