毫米波/太赫兹MEMS开关研究及技术进展  

Research and Technological Progress of Millimeter Wave/Terahertz MEMS Switches

作　　者：张博[1] 李依桐 张乃柏[1] 宋瑞良[1] 邓琨 杨光耀 刘军 ZHANG Bo;LI Yitong;ZHANG Naibo;SONG Ruiliang;DENG Kun;YANG Guangyao;LIU Jun(Beijing Research and Development Center,The 54th Research Institute of China Electronic Technology Group Corporation,Beijing,100043,CHN)

机构地区：[1]中国电子科技集团公司第五十四研究所北京研发中心,北京100043

出　　处：《固体电子学研究与进展》2025年第1期41-46,共6页Research & Progress of SSE

基　　金：国家重点研发计划资助项目(2018YFE0202500)。

摘　　要：毫米波/太赫兹MEMS开关是一种采用半导体技术制造的微小型可移动器件,具有体积小、功耗低、集成度高等优点。本文首先介绍了毫米波/太赫兹MEMS开关的结构及工作原理,回顾了近年来基于固定梁式和悬臂梁式的毫米波/太赫兹MEMS开关的研究进展,指出对于低功耗的应用来说,悬臂梁式的开关要优于其他的开关设计。然后,分析了几种典型的毫米波/太赫兹MEMS开关的重要性能指标优化方案。最后,阐述了毫米波/太赫兹MEMS开关在6G移动通信的应用,并对其未来研究趋势和面临的挑战进行了总结和展望。Millimeter wave/terahertz MEMS switch is a miniature movable device manufactured using semiconductor technology,which has the advantages of small size,low power consumption,and high integration.The article first explains the structure and working principle of MEMS switches,reviews the research progress of millimeter wave/terahertz MEMS switches based on fixed beam and cantilever beam in recent years,and points out that for low-power applications,cantilever beam switches are superior to other switch designs.Afterwards,the article analyzes the optimization scheme for important performance indicators of typical millimeter wave/terahertz MEMS switches.Finally,the article elaborates on the application of millimeter wave/terahertz MEMS switches in 6G mobile communication,and summarizes and prospects their future research trends and challenges.

关 键 词：微机电开关 电容比 微加工 半导体技术 6G移动通信 

分 类 号：TN40[电子电信—微电子学与固体电子学]