基于压电陶瓷驱动的纳米定位平台复合控制  

Compound Control of Nanopositioning Stag Based on Piezoelectric Ceramics

作　　者：崔良玉 钟俊杰 韩建鑫 马鹏飞 Cui Liangyu;Zhong Junjie;Han Jianxin;Ma Pengfei(School of Mechanical Engineering,Tianjin University of Technology and Education,Tianjin 300222,China;不详)

机构地区：[1]天津职业技术大学机械工程学院,天津市300222 [2]天津职业技术大学天津市高速切削与精密加工重点实验室

出　　处：《工具技术》2025年第1期95-101,共7页Tool Engineering

基　　金：天津市自然科学基金会重点项目(22JCZDJC00740);天津市教委科研计划项目(2022ZD030)。

摘　　要：基于压电陶瓷驱动器迟滞模型的纳米定位平台在迟滞不对称的情况下,研究消除迟滞和蠕动等干扰来控制纳米定位平台。在Prandtl-Ishlinskii模型的基础上,串联一个新的复合叠加算子,得到一个改进的Prandtl-Ishlinskii模型。搭建一个纳米定位实验平台,根据实验数据用模型对压电驱动器的迟滞现象进行建模,并推导出逆模型。设计逆模作前馈、PID作反馈的复合控制系统,并运用遗传算法自动调节控制系统的参数。通过仿真以及实验验证该模型的准确性以及定位平台控制系统的有效性。The nanopositioning platform based on the hysteresis model of piezoelectric ceramic driver is a topic of great research significance,mainly to eliminate interference such as hysteresis and peristaltic to control the nanopositioning platform in the case of hysteresis asymmetry.In this study,an improved Prandtl-Ishlinskii model by introducing a new composite superposition operator in addition to the existing model is proposed.A nano-positioning experimental stag is established and experimental data is used to model the hysteresis phenomenon of the piezoelectric actuator and its inverse model is derived.A composite control system is designed,incorporating the inverse model as feedforward and PID control as feedback,with automatic parameter adjustment using a genetic algorithm.The accuracy of the model and the effectiveness of the control system for the positioning stag are verified through simulations and experimental validation.

关 键 词：压电驱动器 微纳定位平台 迟滞模型 Prandtl-Ishlinskii模型 PID控制 遗传算法 

分 类 号：TG333.11[金属学及工艺—金属压力加工] TH188[机械工程—机械制造及自动化]