电容式三维力柔性触觉传感器及软抓取研究  

Research on capacitive three-dimensional force flexible tactile sensor and soft grasping

作　　者：方定 汤秀芳[1] 洪炜强 陈叶馨 潘明启 郭小辉 FANG Ding;TANG Xiufang;HONG Weiqiang;CHEN Yexin;PAN Mingqi;GUO Xiaohui(School of Mathematics and Information Engineering,Xinyang Vocational and Technical College,Xinyang 464000,China;School of Integrated Circuits,Anhui University,Hefei 230601,China)

机构地区：[1]信阳职业技术学院数学与信息工程学院,河南信阳464000 [2]安徽大学集成电路学院,安徽合肥230601

出　　处：《传感器与微系统》2025年第3期50-53,57,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金青年科学基金资助项目(61901005)。

摘　　要：电子皮肤的发展迫切需要具有三维力感知能力的高灵敏度柔性触觉传感器。基于3D打印及层层组装技术,提出一种低成本、高灵敏度、响应速度快、实用性强等特点的电容式三维力柔性触觉传感器。传感器由柔性触头、半圆形凹槽、上下电极和基底构成,并利用触觉传感器测试装置对该传感器进行静态/动态特性测试与软抓取应用研究,测试结果表明,该传感器在法向力0~0.3 N和切向力0~0.3 N范围内,其灵敏度分别为7.12 N^(-1)和0.91 N^(-1),具有较快的响应时间(约60 ms)和较低的迟滞误差(约6.43%)。通过将三维力柔性触觉传感器与智能仿生手一体化集成实现目标物软抓取应用研究,实验验证了传感器的有效性和应用性。The development of electronic skin urgently requires highly sensitive flexible tactile sensors with three-dimensional force sensing capabilities.Based on 3D printing and layer-by-layer assembly technology,a three-dimensional force-flexible capacitive tactile sensor with low cost,high sensitivity,fast response speed,and high practicality is proposed.The sensor consists of flexible contacts,semicircular grooves,upper and lower electrodes,and substrate,and the static/dynamic characteristics of the sensor are tested and applied to soft grasp research using a tactile sensor test device,and the test results show that the sensitivity of this sensor is 7.12 N^(-1)and 0.91 N^(-1),respectively,in the range of normal force 0~0.3 N and tangential force 0~0.3 N,with a fast response time about 60 ms and low hysteresis error about 6.43%.By integrating the 3D force-flexible tactile sensors with the intelligent bionic hand to realize the application research of soft grasping,the effectiveness and adaptability of the sensors are experimentally verified.

关 键 词：电子皮肤 三维力传感器 触觉传感器 高灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]