不同气氛下脉冲激光溅射BN的等离子体特性  

Plasma Characteristics of BN Ablated by Pulsed Laser in Different Atmosphere

作　　者：方普懿行 向书杰 刘海庆 李春天 沈瑞琪[1,2] 张伟 FANG Pu-yixing;XIANG Shu-jie;LIU Hai-qing;LI Chun-tian;SHEN Rui-qi;ZHANG Wei(School of Chemistry and Chemical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;Micro-Nano Energetic Devices Key Laboratory,Ministry of Industry and Information Technology,Nanjing 210094,China;Xi′an North Qinghua Electromechanical Co.Ltd.,North Special Energy Group,Xi′an 710025,China)

机构地区：[1]南京理工大学化学与化工学院,江苏南京210094 [2]微纳含能器件工业和信息化部重点实验室,江苏南京210094 [3]北方特种能源集团西安北方庆华机电有限公司,陕西西安710025

出　　处：《火炸药学报》2025年第2期128-137,I0006,共11页Chinese Journal of Explosives & Propellants

基　　金：国家自然科学基金(No.12074187)。

摘　　要：为了研究不同气氛环境下脉冲激光溅射含氮化合物产生的等离子体特性及其演化过程,以氮化硼(BN)作为靶材,使用脉冲激光分别溅射氮气、空气和近真空环境中的BN,通过光谱仪采集不同延迟时间下溅射所产生的等离子体信号,揭示了等离子体的生长及消亡过程。结果表明,在空气中溅射BN会生成大量氧等离子体并呈现特征光谱峰,而在氮气或近真空环境下溅射时,该特征峰基本消失;在氮气中溅射BN时,产生的氮原子(N I)、一价氮离子(N II)和三价氮离子(N IV)数量较多,并且氮等离子体存在时间最长,N I和N IV的存在时间分别最长可达4400 ns和3450 ns;在3种不同溅射环境下,激光溅射氮气中的BN最有利于氮原子簇的制备。In order to investigate the plasma characteristics and evolution of nitrogen-containing compounds generated by pulsed laser ablation in different atmospheric environments,by using boron nitride(BN)as the target material,it was ablated by pulsed laser in nitrogen,air,and near-vacuum,respectively.The plasma signals generated by ablation with different delay times were collected by spectrometer,revealing the growth and extinction processes of plasma.The results show that the BN ablated in air generates a large amount of oxygen plasma and exhibits a characteristic spectral peak,which essentially disappears when ablating in nitrogen or near vacuum.When BN is ablated in nitrogen,the higher number of nitrogen atoms(N I),monovalent nitrogen ions(N II)and trivalent nitrogen ions(N IV)are generated,and the nitrogen plasma exists for the longest time.For N I and N IV the longest existence time are up to 4400 ns and 3450 ns,respectively.Laser ablation of BN in nitrogen is the most favorable for the preparation of nitrogen atom clusters under the three different sputtering environments.

关 键 词：分析化学 脉冲激光 激光溅射 氮化硼 BN 氮等离子体 氮原子簇 

分 类 号：TJ55[兵器科学与技术—军事化学与烟火技术] O65[理学—分析化学]