基于可溯源光栅的高精度位移测量系统研究及不确定度分析  

Traceable-Grating-Based High Precision Displacement Measurement System and Its Uncertainty Analysis

作　　者：高启元 施玉书[2,3] 张树 史舟淼[3] 王康 胡佳成 GAO Qiyuan;SHI Yushu;ZHANG Shu;SHI Zhoumiao;WANG Kang;HU Jiacheng(Colloge of Metrology Measurement and Instrument,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;Shenzhen Institute Technology Innovation,National Institute of Metrology,Shenzhen,Guangdong 518107,China)

机构地区：[1]中国计量大学计量测试与仪器学院,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]深圳中国计量科学研究院技术创新研究院,广东深圳518107

出　　处：《计量学报》2025年第2期151-159,共9页Acta Metrologica Sinica

基　　金：国家重点研发计划(2022YFF0605501,2022YFF0605502,2022YFF0605505)。

摘　　要：通过构建以光栅栅距校准值作为栅距量值的可溯源光栅位移测量系统,实现量值从米定义到光栅位移测量系统的传递。分析了光栅与读数头之间的对位误差对栅距和干涉信号对比度的影响。并进行系统的静态稳定性实验和与激光干涉仪的位移测量一致性实验,实验结果表明:可溯源光栅位移测量系统的短期稳定性为3.35 nm,长期稳定性优于70 nm;系统与激光干涉仪对不同行程位移的测量结果具有较好的一致性,在10μm和500μm位移范围内的各测量点处,测量平均值误差的绝对值分别不超过0.07%和0.013%。最后分析系统测量不确度的主要来源,并评定系统对10μm位移测量的不确定度,结果显示相对扩展不确定度为0.83%(k=2)。By constructing a traceable grating displacement measurement system with the grating pitch calibration value as the value of the pitch,the transfer of the value from the meter definition to the grating displacement measurement system was achieved.The influence of the alignment error between the grating and the read head on the grating pitch and interference signal contrast was analyzed.The static stability experiment of the system and the displacement measurement consistency experiment with the laser interferometer were conducted,and the experimental results showed that:The shortterm stability of the traceable grating displacement measurement system was 3.35 nm,and the long-term stability was better than 70 nm;The system and the laser interferometer have good consistency in the measurement results of different stroke displacements,at each measurement point within the 10μm and 500μm displacement ranges,the absolute values of the measurement average errors do not exceed 0.07%and 0.013%respectively.Finally,the main sources of system measurement uncertainties were analyzed,and the system uncertainty for 10μm displacement measurements was evaluated,the relative expanded uncertainty result was 0.83%(k=2).

关 键 词：几何量计量 可溯源光栅 光栅位移测量系统 对位误差 激光干涉仪 不确定度 

分 类 号：TB921[一般工业技术—计量学]