基于热传导的高鲁棒性温压一体柔性传感器敏感机理的研究  

Mechanism of High-Robustness Flexible Sensor for Temperature and Pressure Integration Based on Heat Conduction

作　　者：张永豪 朴林华[1] 孙嘉浩 ZHANG Yonghao;PIAO Linhua;SUN Jiahao(Beijing Key Laboratory for Sensor,Beijing Information Science&Technology University,Beijing 100192,China)

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100192

出　　处：《压电与声光》2025年第1期98-103,107,共7页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61771060);北京市教育委员会科研计划项目资助(KZ20231123221);北京市新世纪百千万人才工程培养资助项目(2019A20);现代测控技术教育部重点实验室资助(2024202101);北京信息科技大学北京市传感器重点实验室资助(2024202108)。

摘　　要：该文提出了一种基于热传导的高鲁棒性温压一体柔性传感器结构,并研究了其敏感机理。通过COMSOL建立三维模型结构,计算了敏感结构内的温度场。计算结果表明,基于热传导的高鲁棒性温压一体柔性传感器的输入压强与输出电压成反比例关系,当压强为0~500 kPa时,传感器灵敏度为-0.205 mV/kPa,非线性度为6.161%;当压强为525~740 kPa时,传感器灵敏度为-4.937 mV/kPa,非线性度为9.628%。In this paper,we propose a high-robustness,temperature-pressure integrated flexible sensor based on heat conduction and analyze its underlying mechanism.A three-dimensional model was established using COMSOL,and the temperature field in the structure was calculated.The results show that the input pressure is inversely proportional to the output voltage of the proposed sensor.The sensitivity is-0.205 mV/kPa in the range of 0-500 kPa with a nonlinearity of 6.161%.Likewise,the sensitivity is-4.937 mV/kPa in the range of 525-740 kPa with a nonlinearity of 9.628%.We describe the underlying mechanism of the sensor,providing a theoretical foundation for optimizing its parameters and structure.

关 键 词：温压一体柔性传感器 微机械 有限元分析 高鲁棒性 敏感机理 

分 类 号：TN37[电子电信—物理电子学]