杠杆-复桥式3D压电微定位平台设计与分析  

Design and analysis of a 3D piezoelectric micro-positioning platform of lever-compound bridge type

作　　者：金俊杰[1] 王硕 孙凤[1] 郝岩松 徐方超[1] 张晓友 JIN Junjie;WANG Shuo;SUN Feng;HAO Yansong;XU Fangchao;ZHANG Xiaoyou(School of Mechanical Engineering,Shenyang University of Technology,Shenyang 110870,Liaoning,China;Department of Mechanical Engineering,Nippon Institute of Technology,Saitama 345-8501,Japan)

机构地区：[1]沈阳工业大学机械工程学院,辽宁沈阳110870 [2]日本工业大学机械工学科,日本埼玉345-8501

出　　处：《沈阳工业大学学报》2025年第2期214-222,共9页Journal of Shenyang University of Technology

基　　金：国家自然科学基金项目(52005345,52005344);国家重点研发计划项目(2020YFC2006701)。

摘　　要：【目的】针对目前微定位平台体积大、小行程的问题,提出了一种基于杠杆-复桥式的新型位移放大机构,设计了可实现大行程运动的三自由度压电微定位平台。【方法】首先,提出压电微定位平台的结构并分析其工作原理:压电驱动器产生初始位移,该位移先被复桥结构放大,再通过杠杆机构进行二次放大,将最终放大的位移输出到动平台。其次,设计并优化杠杆位移放大机构和复桥位移放大机构,根据静力学、材料力学和弹性力学理论建立杠杆位移放大机构和复桥位移放大机构的刚度模型和位移放大比数学模型。根据理论模型对杠杆位移放大器和复桥位移放大器的尺寸进行优化,优化后的总体放大倍数为20.6。再次,对柔性铰链进行结构优化,针对4种典型的切口形状进行有限元仿真研究,在分析4种柔性铰链输出位移与输入力的关系后确定采用直梁型柔性铰链。对整体压电驱动微定位平台进行有限元仿真,分析压电陶瓷制动器变形放大后的位移输出性能和绕x轴、y轴的转动输出性能。最后,对所设计的压电驱动微定位平台进行输出测试,并对位移放大器的z轴方向位移输出性能和绕x轴、y轴的转动输出性能进行实验验证。【结果】有限元仿真结果显示,压电驱动微定位平台的动平台在z轴方向的输出位移最大约为740μm,仿真放大倍数为15,绕x轴、y轴的最大输出转动角度分别为0.83°和0.86°。压电驱动微定位平台的输出测试结果显示升压曲线与降压曲线不重合,具有迟滞现象,z方向的最大输出位移为706μm,当电压为30 V时,迟滞位移最大为65μm。绕x轴方向最大输出角度为0.8°,绕y轴方向最大输出角度为0.79°。当电压为30 V时,绕x轴方向迟滞角度最大为0.062°;当加载电压为45 V时,绕y轴方向迟滞角度最大为0.047°。与仿真结果对比,沿z轴方向移动以及绕x轴和y轴方向旋转的最大[Objective]In response to the problems of large volume and small stroke of current micro-positioning platforms,a new displacement amplification mechanism of a lever-compound bridge type was proposed,and a three-degree-of-freedom piezoelectric micro-positioning platform that could achieve large-stroke motion was designed.[Methods]First,the structure of the piezoelectric micro-positioning platform was proposed,and its working principle was analyzed.The piezoelectric actuator generated initial displacement,which was first amplified by the compound bridge structure and then amplified again by the lever mechanism.The final amplified displacement was output to the moving platform.In addition,the lever and compound bridge mechanisms for displacement amplification were designed and optimized,and the stiffness model and displacement amplification ratio mathematical model of the lever and compound bridge mechanisms for displacement amplification were established with theories of statics,material mechanics,and elasticity.According to the theoretical model,the dimensions of the lever and compound bridge mechanisms as displacement amplifiers were optimized,and the overall amplification factor after optimization was 20.6.Then,the structure of the flexible hinge was optimized,and finite element simulation was conducted on four typical notch shapes.After the analysis of the relationship between the output displacement and input force for the four flexible hinges,the flexible hinge of the straight beam type was selected.Finite element simulation was performed on the overall piezoelectric micro-positioning platform to analyze the displacement output performance and rotational output performance around the x-axis and y-axis of the piezoelectric ceramic actuator after deformation amplification.Finally,output testing was conducted on the designed piezoelectric micro-positioning platform.Experimental verification was conducted on the z-axis direction displacement output performance of the displacement amplifier and its rotational outp

关 键 词：微定位平台 小行程 三自由度 柔性铰链 杠杆机构 复桥机构 有限元 最大误差 

分 类 号：TP202[自动化与计算机技术—检测技术与自动化装置]