用于C/SiC高温复合材料应力测试的薄膜应变计制备及性能研究  

Fabrication and performance study of thin-film strain gauges for straintest of high-temperature C/SiC composites

作　　者：张煜杰 裴伟钦 唐逸杰 蒋洪川[1] ZHANG Yujie;PEI Weiqing;TANG Yijie;JIANG Hongchuan(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]电子科技大学电子薄膜与集成器件全国重点实验室,四川成都611731

出　　处：《计测技术》2025年第1期80-87,共8页Metrology & Measurement Technology

基　　金：国家重点研发计划项目(2021YFB3801700);航空科学基金项目(20230046080008)。

摘　　要：针对C/SiC复合材料表面高温应变测量的难题,提出基于高温无机胶平坦化处理、磁控溅射技术和原子层沉积(Atomic Layer Deposition,ALD)的薄膜应变计制备方法。采用刷涂无机胶的方式,实现C/SiC复合材料表面的平坦化,之后利用磁控溅射和原子层沉积技术,制备Pt敏感层和复合绝缘层组成的薄膜应变计。Pt敏感层采用硬质掩膜和直流溅射的方式制备,其电阻为75Ω,厚度为450 nm。在绝缘层中,通过直流溅射和原子层沉积的方式,在C/SiC复合材料衬底表面分别沉积YSZ/Al_(2)O_(3)、Al_(2)O_(3)-YSZ/Al_(2)O_(3)和HfO_(2)-YSZ/Al_(2)O_(3)3种厚度为1.2μm的复合绝缘层,并对3种绝缘层的高温绝缘性能进行测试,结果表明:HfO_(2)-YSZ/Al_(2)O_(3)复合绝缘层的高温绝缘性能最佳,在多次升降温循环后,950℃条件下其绝缘电阻可达32.94 kΩ。基于HfO_(2)-YSZ/Al_(2)O_(3)复合绝缘层制备Pt薄膜应变计并开展测试,结果表明:在室温至600℃条件下,该Pt薄膜应变计具有最大2.93的应变敏感系数(Gauge Factor,GF),最小应变误差为0.01%(600℃、133.2με),最大应变误差为6.49%(200℃、133.2με),具有良好的高温稳定性和应变响应。研究成果为C/SiC复合材料表面高温应变测量提供了新的技术方案,对于促进高超声速飞行器热结构部件高精度应变测量技术发展具有积极意义。A thin film strain gauge fabrication method was proposed based on high-temperature inorganic glue flat-tening treatment,magnetron sputtering technology and atomic layer deposition(ALD),aiming at solving the problem ofhigh-temperature strain measurement on the surface of C/SiC composite materials.The surface of the C/SiC compositematerial was flattened by brushing inorganic glue,and then a thin film strain gauge consisting of a Pt sensitive layer and acomposite insulating layer was prepared using magnetron sputtering and atomic layer deposition technology.Specifically,the Pt sensing layer was prepared by direct current(DC)sputtering through complex surface patterning technology with a hard-mask,achieving a resistance of 75Ωand a thickness of 450 nm.For the insulating layers,three types of compositeinsulating layers(YSZ/Al_(2)O_(3),Al_(2)O_(3)-YSZ/Al_(2)O_(3),and HfO_(2)-YSZ/Al_(2)O_(3)composite layers with a thickness of 1.2μm)wereprepared via DC sputtering and atomic layer deposition.A comparative study was emphatically conducted to evaluate thehigh-temperature insulation performance of the three insulating layers.The results indicated that the HfO_(2)-YSZ/Al_(2)O_(3)composite insulating layer exhibited the best performance,with an insulation resistance of 32.94 kΩat 950℃after multiple thermal cycles.Strain testing under a temperature range from room temperature to 600℃ revealed that the Pt straingauge fabricated based on HfO_(2)-YSZ/Al_(2)O_(3)composite insulation layer achieved a maximum gauge factor(GF)of 2.93.The minimum and maximum measurement errors were 0.01%(600℃,133.2με)and 6.49%(200℃,133.2με),respectively.The strain gauge exhibited superior high temperature stability and strain response.The research results provide anew technical solution for high-temperature strain measurement on the surface of C/SiC composite materials,which possessed positive significance for promoting the development of high-precision strain measurement technology for thermalstructural components of hypersonic vehicle

关 键 词：C/SIC复合材料 应变灵敏系数 绝缘电阻 复合绝缘层 磁控溅射 原子层沉积 

分 类 号：TB93[一般工业技术—计量学] TP212.9[机械工程—测试计量技术及仪器]