基于双PD采样的涡旋光干涉位移快速测量方法研究(特邀)  

Research on rapid displacement measurement method based on vortex interference utilizing double PD sampling(invited)

作　　者：罗聪 袁群[1] 丁辰 马燚岑 侯湘楠 杨文卓 高志山[1] 郭珍艳 徐尧 LUO Cong;YUAN Qun;DING Chen;MA Yicen;HOU Xiangnan;YANG Wenzhuo;GAO Zhishan;GUO Zhenyan;XU Yao(School of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Jiangsu Shuguang Opto-electronics Co.Ltd.,Yangzhou 225109,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]江苏曙光光电有限公司,江苏扬州225109

出　　处：《红外与激光工程》2025年第3期219-227,共9页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(62327814,62175107);国家重点研发计划项目(2022YFF0706302,2023YFF0720601);江苏省高校青蓝工程项目。

摘　　要：涡旋光干涉因具有高灵敏度和高分辨率特性可用于位移的精密测量。但现有的研究中多采用面阵探测器作为涡旋光干涉图的采集手段,受限于面阵探测器帧率,测量速度难以提高。此研究中将面阵探测器替换为高速采样的单点光电探测器。依据涡旋光干涉图的对称与均匀性,探究了光电探测器的数量、靶面大小和几何布局关系,提出了一种空域转时域的方法,排布两个光电探测器采集时域上的正交信号,并进行相位解调和信号细分获得位移结果。基于该原理对测量方案进行了仿真模拟,并构建了马赫-曾德尔型测量光路进行实验验证。实验结果表明,当压电位移结构闭环位移量为50μm、采集卡与单点探测器采样率为0.1 MHz时,测量结果为50.021μm,误差百分比为0.042%。同时,在位移量为10 mm、最快速度为2.6 mm/s移动电机中的重复性误差为2μm。所提方法为快速测量大量程精密位移提供了一种新的途径。Objective Micro-displacement measurement techniques are designed to detect and quantify tiny movements,typically in the range of micrometers to millimeters.This technology plays a vital role in many fields such as precision engineering,materials science,bioengineering and nanotechnology.Laser interferometry has been widely concerned for its high precision,high sensitivity,non-contact and large measuring range.Because of its high sensitivity and high resolution,vortex beam interference technology has been deeply studied and applied in various precision measurement systems.However,due to the limitation of the frame rate of the planar array detector,it is difficult to improve the measurement speed effectively.In order to improve the measurement efficiency,a rapid measurement method for displacement based on dual PD sampling and vortex light interference is proposed.Methods Based on the vortex beam interference principle(Fig.1),the impact of replacing the two-dimensional array detector with PD on the vortex beam interference pattern is discussed,especially the relationship between the number of PD,the size of the target surface and its geometric layout,which is verified by simulation.Therefore,an experimental system was established,and the interference signals collected by PD were de-DC,normalized and unwrapped(Fig.3).By analyzing the relative error of the piezoelectric ceramic displacement test results and the standard deviation of the motor displacement test results,the performance of the system in terms of high precision and speed is verified.Results and Discussions The simulation results show that the PD target surface size has no direct impact on the final measurement results,and the non-orthogonal error introduced by the geometric layout of PD can be effectively corrected by the correction algorithm,and the relative error is reduced from 1.5%to 0.2%(Fig.5),which significantly improves the accuracy of the measurement scheme.In the experiment,an improved Mach-Zehnder optical path(Fig.7)was used,PZT was set as a c

关 键 词：涡旋光 微位移 干涉测量 光电探测器 快速 

分 类 号：O439[机械工程—光学工程]