磁控溅射类金刚石薄膜耐磨润滑性的研究综述  

Research Review on Wear Resistance and Lubricity of Diamond-Like Carbon Films by Magnetron Sputtering

作　　者：王建刚[1] 范宇星 张欣[1] 王玉江 罗伟 王磊 汪晶晶 WANG Jiangang;FAN Yuxing;ZHANG Xin;WANG Yujiang;LUO Wei;WANG Lei;WANG Jingjing(School of Materials Science and Engineering,Hebei University of Science and Technology,Shijiazhuang 050018,China;Academy of Armored Forces Engineering,Beijing 100072,China;Suzhou Boliheng New Energy Technology Co.,Ltd.,Suzhou 215000,China;Zhongke Microcrystal Medical Technology(Suzhou)Co.,Ltd.,Suzhou 215100,China;Leica Microsystems(Shanghai)Co.,Ltd.,Shanghai 201206,China)

机构地区：[1]河北科技大学材料科学与工程学院,河北石家庄050018 [2]陆军装甲兵学院,北京100072 [3]苏州博立恒新能源科技有限公司,江苏苏州215000 [4]中科微晶医疗科技(苏州)有限公司,江苏苏州215100 [5]徕卡显微系统(上海)有限公司,上海201206

出　　处：《材料保护》2025年第4期30-39,共10页Materials Protection

基　　金：石家庄市重大科技专项(246081487A)。

摘　　要：类金刚石薄膜(Diamond-Like Carbon,DLC)因其优异的润滑耐磨性能在多个领域备受关注。本文系统综述了磁控溅射技术在DLC薄膜制备中的研究进展,重点探讨了工艺参数及元素掺杂对薄膜性能的调控机制。首先,分析了气体流量比、偏置电压和电流等关键参数对DLC薄膜微观结构及摩擦学性能的影响:通过优化气体流量比(如Ar/CH4)可调控sp^(2)/sp^(3)键比例,降低摩擦系数;控制偏置电压能够平衡薄膜硬度与表面缺陷;调节电流则直接影响离子通量及sp^(3)键稳定性。其次,总结了非金属(Si、N、F)与金属(Cr、Ti)元素掺杂的作用机理:Si掺杂增强高温稳定性并降低残余应力,N掺杂促进石墨化结构形成,F掺杂通过C-F键钝化表面悬键;Cr和Ti的引入则通过碳化物相抑制氧化并优化力学性能。最后对DLC薄膜技术的未来发展前景进行了展望。Diamond-like carbon(DLC)films have drawn considerable attention in various fields due to their excellent lubricating and wear-resistant properties.This paper systematically reviewed the research progress of magnetron sputtering technology in DLC film preparation,with emphasis on the regulating mechanisms of process parameters and elemental doping on film performance.Firstly,the effects of key parameters including gas flow ratio,bias voltage and current on the microstructure and tribological properties of DLC films were analyzed:optimizing gas ratios(e.g.,Ar/CH4)could regulate the sp^(2)/sp^(3) bond ratio to reduce the friction coefficient;bias voltage control could balance film hardness and surface defects;current adjustment directly affected the ion flux and sp^(3) bond stability.Secondly,the doping mechanisms of non-metal(Si,N,F)and metal(Cr,Ti)elements were summarized:Si doping enhanced high-temperature stability and reduced residual stress;N doping promoted graphitic structure formation;F doping passivated surface dangling bonds through C-F bonds;while Cr and Ti incorporation inhibited oxidation through carbide phases and optimized mechanical properties.Finally,the development prospects of DLC film technology were prospected.

关 键 词：耐磨润滑 类金刚石薄膜 磁控溅射 沉积条件 掺杂 

分 类 号：TG174.44[金属学及工艺—金属表面处理] TH117.3[金属学及工艺—金属学]