基于DEM技术的塑料毛细管电泳芯片加工工艺  

Fabrication Process of Plastic Capillary Electrophoresis Chip Using DEM Technique

作　　者：张立国[1] 陈迪[1] 杨帆[1] 李以贵[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院,上海200030

出　　处：《微细加工技术》2002年第4期61-65,共5页Microfabrication Technology

摘　　要：传统的毛细管电泳芯片基体材料以硅和玻璃为主 ,成本较高 ,且不适合于生化领域。而以聚合物作为基片材料 ,由于材料成本较低 ,且微复制方法成本也很低 ,因此可望在商业上取得广泛的应用。采用DEM技术 ,利用感应偶合等离子体 (ICP)刻蚀设备进行硅的刻蚀 ,然后从硅片直接进行微电铸 ,得到金属模具后 ,再利用微复制工艺 ,最终得到的毛细管电泳芯片基片 ,该技术工艺简单 ,可实现大批量低成本生产 。Traditional capillary electrophoresis chips always use silicon or glass as the substrate materials, which are too expensive for a commercial product and not fit for biochemical applications. Taking the polymer as the substrate material would have wide commerical applications because of the low costs of the material and microreplication. The DEM technique is used to fabricate the plastic capillary electrophoresis chip: the ICP etching system is used for etching silicon substrate, the micro electromoulding with the silicon substrate for obtaining the metal mould and then the microreplication for the chip. The technique is simple in processing and low cost in mass production. It has promising applications in future.

关 键 词：DEM技术 塑料 毛细管 电泳芯片 加工工艺 

分 类 号：TN43[电子电信—微电子学与固体电子学]