一种栅型结构微机械陀螺的研究  

Study on a Silicon Micromachined Gyroscope with Fence Structure

作　　者：熊斌[1] 车录锋[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室

出　　处：《中国机械工程》2003年第3期184-186,共3页China Mechanical Engineering

基　　金：国家重点基础研究发展规划资助项目 (G19990 3 3 10 1)

摘　　要：介绍了一种新型结构微机械陀螺的设计及制作。新型陀螺的驱动振动和敏感检测振动的阻尼均为滑膜阻尼 ,且几乎相同 ,惯性质量块为栅型结构 ,由弹性悬臂梁支撑 ;驱动固定电极和敏感检测固定电极位于惯性质量块下方。分析了新型陀螺的工作特性 ,说明了陀螺结构参数对陀螺灵敏度的影响。实验结果表明 ,在大气状态下 ,新型栅结构微机械陀螺的驱动和敏感检测品质因子 Q均可达到A novel gyroscope with the same Q-factor of detected mode and driven mode was designed. The device structure which we called 'fence gyro' consists of a proof mass with bars linked up to substrate by suspend springs. The fixed interdigitated-driving electrodes and interdigitated-sensing electrodes under the proof mass are located on substrate. The characteristic on the gyro was analyzed. The calculated results show the effect of the structure parameters of the gyro on the sensitivity of the gyro. The experimental results show that the device has its Q-factor of detected mode and driven mode in almost same order of 66 at atmospheric pressure.

关 键 词：栅型结构 微机械陀螺 动力学方程 角速度传感器 微机械加工技术 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]