喷墨打印制备的SnO_2薄膜的气敏特性  

Gas sensing properties of SnO_2 films prepared by ink-jet printing technique

作　　者：沈文锋[1] 赵岩[2] 张彩碚[1] 

机构地区：[1]东北大学理学院,辽宁沈阳110004 [2]中国科学院金属研究所,辽宁沈阳110016

出　　处：《传感器技术》2003年第1期5-8,共4页Journal of Transducer Technology

基　　金：国家重点基础研究发展规划(973)项目(G2000067205-4)

摘　　要：简介了喷墨打印制备薄膜技术的优势与特点,配制了SnO2前驱溶液墨水,并利用该技术在金叉指氧化铝基片上喷镀SnO2前驱溶液墨水,而制得了SnO2气敏薄膜元件。利用XRD分析了SnO2薄膜的晶体结构。通过控制喷打墨水的次数,方便地控制了最终薄膜的厚度。并初步探讨了喷墨打印次数对最终薄膜元件性能的影响。当薄膜只喷打一次时,具有极高的电阻值,而且灵敏度比较低。而随着喷打次数的增加,即薄膜厚度的提高,薄膜电阻也随之降低,并对乙醇具有较好的气敏性能。*'Predominance and principle of inkjet printing thin films technique are reviewed.By this technique,SnO2 gassensing thin films were prepared expediently.SnO2 inks were prepared firstly,and then printed onto alumina substrate with interdigital gold electrodes.The thickness of the films was controlled by selecting different printing times.The structure of the films was investigated by XRD.The influence of printing times on SnO2 gas sensing characteristics was discussed.When printed only once,the films gained the highest resistance and lowest sensitivity.With increasing printing times,the sensitivity of SnO2 film increased and the resistance decreased.

关 键 词：喷墨打印 制备 SNO2薄膜 气敏特性 二氧化锡 气敏薄膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP334.83[自动化与计算机技术—控制科学与工程]