GaAs微波单片集成电路(MMIC)的可靠性研究  

Research on Reliability of GaAs Microwave Monolithic Integrated Circuit (MMIC)

作　　者：黄云[1] 

机构地区：[1]信息产业部电子第五研究所,广州510610

出　　处：《微电子技术》2003年第1期49-52,共4页Microelectronic Technology

摘　　要：本文介绍了GaAsMMIC的可靠性研究与进展 ,重点介绍了工艺表征工具 (TCV)、工艺控制监测 (PCM )和统计工艺控制 (SPC)等实现产品高质量、高可靠性和可重复性的可靠性保障技术 ,为国内GaAsMMIC可靠性研究提供了新的思路。The development in the research on reliability of GaAs microwave monolithic integrated circuit (MMIC) has been introduced in this paper. The emphasis is placed on the reliability assurance technology aspects of MMIC devices, such as Technology Characterization Vehicle (TCV), Process Control Monitor (PCM) and Statistical Process Control (SPC), so as to offer a new approach for the research on reliability of GaAs MMIC.

关 键 词：MMIC 砷化镓 微波单片集成电路 可靠性 失效机理 

分 类 号：TN454[电子电信—微电子学与固体电子学] TN406