微机电系统纳米摩擦学研究进展  

Progress of Research on Nanotribology of Microelectromechanical System

作　　者：王庆良[1] 王爱军[1] 葛世荣[1] 刘金龙[1] 

机构地区：[1]中国矿业大学机电工程学院,江苏徐州221008

出　　处：《合成润滑材料》2003年第1期33-39,共7页Synthetic Lubricants

摘　　要：随着微型机电系统(MEMS)的快速发展,MEMS摩擦学已成为纳米摩擦学研究中最活跃的前沿领域之一。微观尺寸上的摩擦磨损和润滑对整个MEMS系统的性能、稳定性和寿命起着决定作用,因此研究MEMS的微观摩擦学性能至关重要。综述了近年来国内外MEMS摩擦学研究的新进展,介绍了MEMS系统的纳米摩擦学特性,包括环境条件、材料处理、表面改性、分子薄膜润滑等在解决MEMS摩擦和润滑问题上的研究状况,提出了当前相关研究的几个重要问题。With swift developing of nanotribology and microelectromechanical system ( MEMS) , microtri-bology of MEMS is one of the most active research areas in nanotribology. It is found that the systematic perform-ance , operating stability and service life of MEMS are determined to great extent by friction and wear on nanom-eter scale. So it is most important to understand the microtribological properties. The latest development of re-searches on nanotribology of MEMS including environment , the features of friction and wear the application of surface modification as well as the ultra - thin film lubrication for MEMS is reviewed. Finally, some suggestions about the further study on the nanotribology of MEMS are proposed.

关 键 词：固体薄膜 超薄膜润滑 微机电系统 纳米摩擦学 研究进展 

分 类 号：TH117.1[机械工程—机械设计及理论] TH－39