离子束辅助沉积钼酸铅晶体表面红外增透膜  

Preparation of infrared antireflection coating on PbMoO_4 substrateby using ion-assisted deposition technology

作　　者：周团团[1] 胡焕林[1] 孙嵩泉 

机构地区：[1]合肥工业大学机械与汽车工程学院,安徽合肥230009 [2]普乐光技术有限公司,安徽合肥230088

出　　处：《合肥工业大学学报（自然科学版）》2003年第2期242-245,共4页Journal of Hefei University of Technology：Natural Science

摘　　要：由于钼酸铅晶体具有优异的机械特性、光学特性及较高的声光品质因数,故采用离子束辅助沉积技术,在钼酸铅晶体表面制备了宽带红外增透膜。文章简单介绍了镀膜设备的改造特点,并对整个工艺过程进行了分析研究。试验表明所镀膜层的光学特性及膜层品质大大提高,在光纤通信领域具有广阔的应用前景。PbMoO4 single crystal has excellent mechanical and optical properties and higher acoustics figure,and the broadband infrared antireflection coating on PbMoO4 single crystal has been made by using the ionassisted deposition technology. The characteristics of the coating machine are introduced simply and the coating process are analyzed. A series of measurements suggest that the optical performance and coating quality have been improved drastically and this kind of coating will be widely used in the fiber optical communication industries.

关 键 词：离子束辅助沉积 钼酸铅晶体 红外增透膜 真空系统 光学性能 膜层稳定性 透射率 

分 类 号：O484.41[理学—固体物理]