可变波长光纤光栅滤波器用微驱动器的研制  

A Micro Actuator for Variable Wavelength Fiber Grating Filter

作　　者：李以贵[1] 佐佐木实[2] 羽根一博[2] 

机构地区：[1]上海交通大学微纳米科学技术研究院,上海200030 [2]日本东北大学机械电子系

出　　处：《微细加工技术》2003年第1期69-72,共4页Microfabrication Technology

摘　　要：为了研制可调谐光纤光栅滤波器而采用拉伸装置和光纤光栅一体化的微小器件结构。实现方法是由微细加工技术加工制造一种新的波长可变光纤光栅滤波器用驱动器,该微型驱动器采用电磁式驱动,由上下两层线圈构成,每个线圈有21匝平面线圈,产生约0.2μNm的扭矩,对应光纤光栅的反射波长变化约5nm。它可应用于可调谐光纤光栅滤波器的驱动。A new type of tunable fiber grating filter which is a fiber grating integrated with a micro actuator is described. The micro actuator is a type of electromagnetic actuator that consists of plane electromagnetic coils fabricated by micromaching technology. The actuator has two coils up and down, and each coil has 21 turns.It generates about 0.2μNm torque. The experiment shows that reflect wavelength change of fiber grating is about 5nm. We confirmed that the micro actuator could be used for actuating the tunable fiber grating filter.

关 键 词：光纤光栅滤波器 微驱动器 微细加工技术 

分 类 号：TN253[电子电信—物理电子学]