热梯度化学气相沉积工艺与设备的发展  

THE DEVELOPMENT OF PROCESSES AND APPARATUS OF TEMPERATURE GRADIENT CVD

作　　者：蒋建纯[1] 

机构地区：[1]中南大学粉末冶金国家重点实验室,湖南长沙410083

出　　处：《炭素》2003年第1期11-16,共6页Carbon

摘　　要：用化学气相沉积法增密多孔坯体,尤其是炭纤维增强坯体,使坯体沿横截面建立起一定的温度梯度,控制碳源气体仅在坯体高温带上裂解、沉积。沉积增密的坯体的电导性和热导性提高,区域温度升高,使高温区向低温区扩展,沉积区逐步扩大。该工艺较能保证获得所需要的材料的显微组织结构,并能大大提高沉积效率。为克服当前广泛使用的等温等压法CVD及压差法CVD的工艺设备生产周期长和生产成本高的不足,本文介绍了几种热梯度化学气相沉积的工艺与设备,同时也比较了其可行性与优缺点。Porous substrate,especially carbon bodies are densified by Chemical Vapor Deposition by establishing a thermal gradient cross the substrate,thermally decomposing a gaseous precursor so deposit an electrically and thermally conductive carbon within the substrate,and shifting the thermal gradient toward the lower temperature zone as deposition proceeds by means of induction heating.This work provides several processes and apparatus, to over come short comings of the state-of-the art isothermal and isobaric proceses and apparatus.The inductive heating and heaterless thermal gradient apparatus and process are the best select.

关 键 词：热梯度 化学气相沉积 工艺 设备 发展 感应加热 CVD 多孔坯体 增密 炭/炭复合材料 

分 类 号：TB332[一般工业技术—材料科学与工程]