微驱动器的原理与应用  

The Principle and Application of Microactuators

作　　者：宫峰飞[1] 

机构地区：[1]华东师范大学物理系,上海200062

出　　处：《电子元件与材料》2003年第6期33-36,共4页Electronic Components And Materials

基　　金：上海市启明星项目(No.98QE14029)

摘　　要：为了优化设计微驱动器,笔者通过对比近年来各种微驱动器的研究和发展,系统地概括总结了微驱动器所采用的主要的驱动原理、驱动方式和加工技术及其存在的优缺点等。并在此基础上,首次将微驱动器按功能进行了分类。The research and development of microactuators in recent years are reviewed. The actuating principles, actuating modes, processing techniques, and their advantages and disadvantages are outlined in order to optimize the design of actuators. The microactuators are classified by their function. Future research and development of microactuators are discussed.

关 键 词：微驱动器 微型机电系统 驱动原理 驱动方式 加工技术 

分 类 号：O4[理学—物理]