微机电系统(MEMS)纳米摩擦学研究进展  

Progress of Research on Nanotribology of Microelectromechanical Systems

作　　者：王庆良[1] 葛世荣[1] 

机构地区：[1]中国矿业大学机电工程学院,徐州221008

出　　处：《润滑与密封》2003年第3期88-91,94,共5页Lubrication Engineering

摘　　要：随着微型机电系统(MEMS)的快速发展,MEMS摩擦学已成为当前纳米摩擦学研究中最活跃的前沿领域之 一。微观尺寸上的摩擦磨损和润滑对整个MEMS系统的性能、稳定性和寿命起着决定作用,因此研究MEMS的微观摩 擦学性能至关重要。本文对近年国内外MEMS摩擦学研究的新进展作了综述,介绍了MEMS系统的纳米摩擦学特性, 讨论了包括环境条件、材料处理、表面改性、分子超薄膜润滑等在解决MEMS摩擦和润滑问题上的研究状况,提出了 当前相关研究的几个重要问题。With developing of nanotribology and microelectromechanical systems (MEMS), microtribology of MEMS has become more and more important. It is now one of the most active research areas in micro/nanotribology. It is found that the system performance, operating stability and service life of MEMS are determined to a great extent by friction and wear on nanometer scale. So it is most important to understand the microtribological properties. The latest development of researches on nanotribology of MEMS is reviewed in this paper, including the features of fiction and wear, and the application of surface modification as well as the ultra-thin film lubrication for MEMS. Finally, some suggestions about the further study on the nanotribology of MEMS are proposed.

关 键 词：微型机电系统 纳米摩擦学 固体薄膜 超薄膜润滑 研究进展 

分 类 号：TH117.1[机械工程—机械设计及理论] TH－39