光开关中静电驱动的微悬臂梁耦合分析  

The sequential coupling analysis of a cantilever driving by electrostatic force in an optical switch

作　　者：马海阳[1] 王艳华[1] 王明亮[1] 孙道恒[1] 

机构地区：[1]厦门大学机电工程系,福建厦门361005

出　　处：《光学仪器》2003年第3期17-20,共4页Optical Instruments

基　　金：国家自然科学基金项目 ( 5 0 2 75 12 7)

摘　　要：采用顺序耦合法 ,对光开关中的、静电驱动的悬臂梁进行分析 ,得出了悬臂梁的动态响应特性 ,并指出了空气阻尼对器件性能的影响 。In the article a sequence coupling method is used for the analysis of a cantilever beam in an optical switch , which is drived by electrostatic force. From the analysis , the dynamic character of the beam has been gained, that pointing out the influence of air damping. The method is a powerful method for designing sensors of Micro Electronics Mechanical System(MEMS).

关 键 词：悬臂梁 微机械传感器 静电驱动 光开关 顺序耦合 动态响应 空气阻尼 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]