碳化硅内膜空芯传能光纤的研究  

Infrared hollow glass waveguides with SiC film

作　　者：张琦[1] 侯蓝田[1] 李葵英[2] 周桂耀[1] 

机构地区：[1]燕山大学红外光纤与传感研究所,河北秦皇岛066004 [2]燕山大学材料科学与工程学院,河北秦皇岛066004

出　　处：《材料科学与工艺》2003年第2期132-135,共4页Materials Science and Technology

基　　金：国家高技术研究发展计划资助项目(863-715-01-0212).

摘　　要：为了改进空芯传能光纤对10 6μm处CO2激光的传输性能,研制了具有SiC内膜的新型空芯玻璃波导,利用SEM和FTIR等技术分析了反应条件对SiC膜层结构、物相的影响,并测试了光纤的性能.结果表明:温度是影响SiC膜层的重要因素;制得的孔径为950μm,长为2 5m的SiC传能光纤理论损耗约为0 7dB/m,实际传输损耗为0 74dB/m;SiC的吸收蜂有蓝移现象.A novel type of lowloss SiCcoated hollow glass waveguides has been fabricated by using chemical vapor depositing (CVD) method for CO2 laser delivery, and the influences of reaction conditions on properties of waveguides were investigated by analyzing SEM and FTIR absorption spectra. The results of researches indicated that temperature is an important factor having effect on the properties of SiC film; the theoretical transmission loss of a 25 mlong SiC/glass waveguide with an inner diameter of 950 μm is about 07dB/m, but its actual transmission loss is 074 dB/m; the blueshift of fundamental absorption peak of SiC is found in FTIR spectra.

关 键 词：碳化硅 空芯传能光纤 CO2激光 蓝移现象 空芯玻璃波导 CVD SIC薄膜 物相 吸收峰 

分 类 号：TN252[电子电信—物理电子学]