热丝辅助ECR CVD制备cBN薄膜  

Fabrication of Cubic Boron Nitride Films by Electron Cyclotron Resonance CVD Assisted with Hot Filament

作　　者：张生俊[1] 陈光华[1] 

机构地区：[1]北京工业大学材料学院新型功能材料教育部重点实验室,北京100022

出　　处：《无机材料学报》2003年第4期947-950,共4页Journal of Inorganic Materials

基　　金：国家自然科学基金(19874007);北京市自然科学基金(2982013)

摘　　要：立方氮化硼(cBN)是一种具有广泛应用价值的Ⅲ-Ⅴ族二元化合物,其优异性质可与金刚石相比拟或胜之。立方氮化硼的制备与性能研究是近二十年来材料领域关注的焦点之一。我们用热丝辅助ECR CVD方法制备了cBN薄膜,并初步探讨了热丝对cBN形成的作用。偏压并不是cBN形成的唯一主要条件,活性粒子也有非常关键的作用。Cubic boron nitride (cBN) is an important compound of the Ill - V group. It attracts much interest for years around the world due to its excellent properties which are similar to or prior to those of diamond. The fabrication and properties investigation of cBN is one of the attractions to materials researches for decades. In this paper, the fabrication of cBN films by ECR CVD technique assisted with a hot filament was reported. The results show that negative bias is not the unique factor for formation of cBN, the active particles is also an essential factor.

关 键 词：CBN ECR CVD 热丝 

分 类 号：O484[理学—固体物理]