射频CO_2激光陶瓷基板划片机  

RF CO_2 Laser Ceramic Substrate scriber

作　　者：侯廉平 陈培峰[1,2] 陈清明[1,2] 

机构地区：[1]武汉金石凯激光技术有限公司,武汉430074 [2]华中科技大学激光工程研究院,武汉430074

出　　处：《应用激光》2003年第4期209-212,共4页Applied Laser

摘　　要：介绍了RFCO2 激光器及其对陶瓷基板划片的特点。分析了RFCO2 激光陶瓷基板划片的机理 ;给出了整机总体设计方案。对导光系统的激光束进行了模拟 ,给出了导光系统的光路图及聚焦镜焦平面处的光斑尺寸及能量分布图。The characteristic of RF CO 2 laser and its ceramic substrate scribing were presented. The mechanism of scribing ceramic substrate by using RF CO 2 laser was analyzed. The design of the scribing system was presented. The laser beam of the delivery system was simulated. The optical circuit of the delivery system, the beam size and its energy distributing diagrams were plotted. The laser scribing system has reached the counterpart of the foreign country.

关 键 词：陶瓷基板 激光划片 RF-C02激光器 射频二氧化碳激光器 聚焦镜焦平面 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]