可编程相位光栅的结构设计与制作工艺  

Design and fabrication of programmable phase grating structures

作　　者：殷玲[1] 陈非凡[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《清华大学学报（自然科学版）》2003年第8期1009-1012,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目(69978008);教育部高等学校骨干教师资助计划资助项目

摘　　要：可编程相位光栅技术在光通讯领域有较广的应用,也可作为微型光谱仪的新颖色散器件。该文设计了一种基于MEMS的可编程相位光栅,其特征参数可以通过编程控制和改变。通过经典理论建模与分析,设计了可编程相位光栅的结构;并对光栅的光带结构参数进行了优化,从而有利于可编程相位光栅功能的实现,提高了制作的可靠性和成功率;设计了针对可编程相位光栅的表面硅微工艺,并对改善应力、去牺牲层和防粘连等关键问题进行了分析,改进了工艺,成功研制出样品,其结构尺寸约为4mm×6mm,有效工作部分的面积约为4mm×2mm.Programmable phase grating technology can be applied widely in optical communication technologies and can be used as a dispersion device for the micro spectrographs. This paper focuses on the design and fabrication of a programmable phase grating based on microelectromechanical systems (MEMS), the structural parameters of which can be controlled in real time. The structure of the programmable phase grating was designed using classical theory and finite element analysis. The grating structural parameters were optimized to improve the performance and fabrication reliability of the gratings. The programmable phase gratings were then fabricated with a surface micromachining process. The structure dimension is of 4 mm×6 mm with an effective function area of 4 mm×2 mm.

关 键 词：可编程相位光栅 结构设计 制作工艺 MEMS 光带结构 表面硅微工艺 微光机电系统 光通讯 

分 类 号：TN256[电子电信—物理电子学] TN405