基于组件网络方法的微加速度计建模与仿真  

Modeling and Simulation of Micromachined Accelerometer Using Multi-Port-Element Network Method

作　　者：霍鹏飞[1] 马炳和[1] 苑伟政[1] 

机构地区：[1]西北工业大学微纳米系统实验室,陕西西安710072

出　　处：《航空学报》2003年第5期466-470,共5页Acta Aeronautica et Astronautica Sinica

基　　金：国家自然科学基金(50205022);863/MEMS重大专项基金(2003AA404017)资助项目

摘　　要：提出多端口组件网络方法对MEMS进行建模与仿真,建立了惯导MEMS典型功能结构部件的参数化多端口组件模型,联结组件模型形成网络构建了蟹腿式微加速度计的系统模型。用硬件描述语言作为编码工具,Saber作为平台对该微加速度计模型进行了仿真分析。研究表明,采用多端口组件网络可以实现MEMS整体行为的快速仿真,并能分析局部尺寸参数对系统性能的影响。与有限元分析相比较,微加速度计系统模型仿真得到的检测方向的固有频率误差小于1 0%;仿真结果表明梁的宽度变化对系统灵敏度有较大影响,故需要尽量减小梁宽的加工误差。借助该模型还研究了系统对正弦及脉冲输入信号的响应特性。A method for modeling and simulation of MEMS based on multi-port-element network is presented. With this method, the functional components of inertial MEMS are modeled as multi-port-elements and a crab-leg accelerometer is represented as a network composed of these models. All the models are coded in the analogy hardware description language of MAST and simulated on the Saber simulator. With this approach, the system behavior can be rapidly analyzed and the influence of its parameters on the system performance can be evaluated. The simulation of modal frequency of the crab-leg accelerometer model agrees to that of the finite element analysis (within 1.0%). Simulation results indicate that the system sensitivity is seriously influenced by the width of the crab-leg beam, so the fabrication error of the beam width should be reduced as much as possible. The system responses to sinusoidal and pulse input signals are also investigated.

关 键 词：传感器技术 系统级设计 多端口组件网络 微加速度计 建模与仿真 

分 类 号：TH702[机械工程—仪器科学与技术]