可编程相位光栅结构的微机械特性研究  

Research on Micromechanical Characteristics of Programmable Phase Grating

作　　者：殷玲[1] 陈非凡[1] 

机构地区：[1]清华大学精密仪器及机械学系,北京100084

出　　处：《微细加工技术》2003年第3期72-76,共5页Microfabrication Technology

基　　金：国家自然科学基金资助项目(69978008);教育部高等学校骨干教师基金资助项目(2000年度)

摘　　要：描述了可编程相位光栅光带结构微机械特性中的频响特性与回复时光带瞬态行为研究的原理,并介绍了相应的仿真结果。光栅样机采用硅微机械技术加工而成,其测试结果表明,光栅样机的频响特性基本符合理论推导与仿真结果,光带谐振频率在120Hz～240Hz的区间之内,截止频率约为7.14kHz;光带的响应时间与回复时间相当,约为70μs。The principle for investigating the frequency response characteristic and reset transient motion of the mechanical characteristics of the programmable phase grating ribbon structure is described and the simulation results are demonstrated. The grating models were fabricated by silicon micromachining.The tested results indicate that the real frequency response characteristic generally matches to the theory analysis results and simulations, the resonance frequency of a grating ribbon is between 120 Hz～240 Hz and the cut off frequency is about 7.14 kHz. The response time of the grating ribbon is commensurate with the reset time, which is about 70 μs.

关 键 词：可编程相位光栅 微光机电系统 微机电系统 微机械加工技术 光带结构 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]