微加速度开关吸附力仿真计算  

Simulation and compute of the micro-accelerometer switch sticking force

作　　者：田文超[1] 贾建援[1] 

机构地区：[1]西安电子科技大学机电工程学院,陕西西安710071

出　　处：《传感器技术》2003年第11期36-38,共3页Journal of Transducer Technology

基　　金：国家863计划(课题编号:2002AA862011);西安电子科技大学青年科研工作站资助

摘　　要：研究了平面度对微加速度开关触点形貌的影响,建立了触点吸附物理模型,根据微观连续介质理论推导出触点间包含斥力项的吸附力数学模型,经仿真得到吸附力随触点间隙的非线性变化规律,并得到最大吸附力,从而为微加速度开关的结构设计和系统分析提供理论基础。Influence of the plane degree error on the microaccelerometer switch contact point is studied. The sticking physical model on the contact point is found. On the base of the micro continuous medium principle, the mathematical model of the sticking force, which includes the repulsive force, is found too. By simulating, the nonlinear variation law of the sticking force varied with the contact distance and the maximum sticking attractive force are obtained, and the theory reference for structure design and system analysis of the micro accelerometer switch is put forward.

关 键 词：微电子机械系统 MEMS 微加速度开关 吸附力 微观连续介质法 

分 类 号：TH824.4[机械工程—仪器科学与技术]