低电压驱动微机械1×8光开关的动态分析  

Dynamic Analysis of Low Voltage Micro-machining Based 1×8 Optical Switch

作　　者：鲍俊峰[1] 曹钟慧[1] 袁野[1] 邹勇卓[1] 吴兴坤[1] 

机构地区：[1]浙江大学光及电磁波研究中心光电信息工程学系现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光电子．激光》2004年第1期41-44,共4页Journal of Optoelectronics·Laser

摘　　要：研制了一种小体积、低成本及可扩展的低电压1×8微机械电子系统(MEMS)光开关。由5V电压驱动电磁机构动作,带动微反射镜绕直径100μm转轴转动,实现开关的状态切换。开关时间2ms,插入损耗<0.8dB,具有断电自锁功能。器件制作采用微细电火花加工(EDM)技术。应用有限元方法进行了器件开关时间的理论分析,器件的结构优化设计,并与实测结果进行了比较。A 1×8 fiber optic switch based on precision electrical discharge machining (EDM) technique, which allowed fast switch (2 ms),low insertion loss (0.8 dB), return loss (≥49 dB) and wide bandwidth, was reported. Each reflection cell in the switch consists of an electromagnetically actuated gold-coated silicon mirror rotating around a 100 μm diameter shaft and a miniature 5 V driven coil. The switch is scalable to 8×8 and allows the realization of high capacity cross-connects. A detailed switching dynamic analysis was conducted by utilizing FEA software ANSYS. The calculated switch time as a function of driving voltage was compared with the measurement and a reasonably good agreement was obtained.

关 键 词：微光电子机械系统 MOEMS 光开关 电火花加工 EDM 光纤通信 开关时间 工作原理 性能测试 

分 类 号：TN253[电子电信—物理电子学] TN929.11