氮化硅流延膜的制备  

Preparation of Silicon Nitride Slips by Tape Casting

作　　者：陈殿营[1] 张宝林[1] 庄汉锐[1] 李文兰[1] 

机构地区：[1]中国科学院上海硅酸盐研究所,上海200050

出　　处：《硅酸盐通报》2003年第6期71-74,共4页Bulletin of the Chinese Ceramic Society

基　　金：中科院创新基金资助项目

摘　　要：流延成型是一种制备高质量陶瓷基片的成型方法。氮化硅是一种高热导率的材料 ,有望在电子基片领域获得应用。本文利用流延成型制备了具有较好柔韧性和一定强度的氮化硅流延素坯膜。研究了无水乙醇、无水乙醇 /丁酮作为溶剂时对浆料粘度的影响。通过优化流延浆料添加剂的各种配比 ,得出了适合氮化硅粉体 (SN -E10 )流延的最佳配方。Tape casting method is the one for manufacturing high quality ceramic substrate with flat,large area.Silicon nitride ceramic is a high thermal conductivity material and it is a promising material for highly integrated circuits.In this paper,tape casting green sheet of silicon nitride ceramic with adequate strength and flexibility was prepared by tape casting The effect of solvent of EtOH as well as EtOH/MEK on the viscosity of slurry was studied.By adjusting the ratio of additives(solvent,dispersant,binder and plasticizer),an optimum ratio was acquired for tape casting of silicon nitride powder(SN-E10).

关 键 词：氮化硅 流延成型 陶瓷基片 热导率 流延素坯膜 浆料粘度 添加剂 

分 类 号：TQ174.756[化学工程—陶瓷工业]