压电式微定位工作台及其控制系统  

Micro-positioning Stage Based on Piezoelectric Actuator and Its Controlling System

作　　者：孙宝玉[1] 梁淑卿[1] 韩连英[1] 荆丹[1] 王登月 

机构地区：[1]长春工业大学机电学院,长春130012 [2]长春市新星锅炉厂,长春130021

出　　处：《微细加工技术》2003年第4期65-68,78,共5页Microfabrication Technology

基　　金：长春工业大学科技发展基金资助项目(03116)

摘　　要：为了提高机床的定位精度,研究、设计了一种以柔性铰链为导向元件、压电陶瓷为驱动器的微定位工作台。微定位工作台在滚珠丝杠副驱动的基础上,对工作台进行了二次精定位。给出了工作台的设计简图,并对其动力学模型进行了分析,结合检测装置和微机控制系统,设计了基于前馈控制同数字PID反馈控制相结合的复合控制的微定位控制系统。实测表明,微定位工作台定位分辨率可达到0.01μm,可满足精密、超精密加工的需要。A kind of micro-positioning stage driven by piezoelectric actuator and guided by flexible joint is researched and designed for improving the precision of machining tools.Based on the ball feed screw, the stage realizes the secondary precise positioning. The design schematic of the stage is given and its dynamic model of mechanism is analyzed.Combining computer control system and detecting device, the micro-positioning system of compound control is designed,which is based on the combination of feed forward and digital PID feedback control.The experimental measurements show that the positioning resolution arrives at 0.01 μm,which can meet the needs of super-precise manufacture.

关 键 词：柔性铰链 压电陶瓷 微定位工作台 数字PID反馈控制 

分 类 号：TH703.8[机械工程—仪器科学与技术] TP273[机械工程—精密仪器及机械]