一种抗大过载微型加速度计研究  

A novel piezoresistive accelerometer with high accuracy and overload ability

作　　者：曾昭君[1] 石进杰[1] 

机构地区：[1]北京大学微电子研究所,北京100871

出　　处：《微纳电子技术》2003年第7期281-283,288,共4页Micronanoelectronic Technology

摘　　要：讨论了一种抗大过载 (15 0 0 0 0 g)的微型加速度计 ,主要内容包括 :阐述加速度计的工作原理 ;设计一种新型十字梁的器件结构 ,并对这种结构进行抗大过载的冲击实验 ,以验证这种新型的结构对于大过载冲击的可靠性 ;进而利用ANSYS对器件进行模态分析 ,找出结构上应变最大的位置 ,并对结构尺寸进行优化 ;提供一种可能的电路版图说明 ,并对加速度计的灵敏性进行理论分析 ;Design and simulation of a novel accelerometer sensor with high accuracy and overload ability, which can undergo 150000g acceleration are presented. And its principle is explained, and a new cross structure is designed. At the same time, the impact experiment has been done, and the reliability tests have also been carried out. We also optimized its structure through modal analysis by using of ANSYS. At last, the electrical layout and processing have been developed.

关 键 词：微型加速度计 MEMS 大过载 ANSYS 工作原理 

分 类 号：TH824.4[机械工程—仪器科学与技术] TH-39[机械工程—精密仪器及机械]