微机械热对流加速度传感器可靠性研究  

Research on reliability of the MEMS convective accelerometer

作　　者：杨拥军[1] 吝海锋[1] 师谦 徐爱东[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051 [2]中国电子产品可靠性与环境实验研究所,广东广州510610

出　　处：《微纳电子技术》2003年第7期317-320,共4页Micronanoelectronic Technology

基　　金：电子元器件可靠性物理及其应用技术重点实验室基金支持项目

摘　　要：介绍了一种新型的微机械加速度计———热对流加速度计的工作原理及加工制造工艺。由于加速度计由单晶硅腔体、加热器和两只在加热器两侧并与加热器等距的温度传感器构成 ,其本身没有活动部件 ,因此这种加速度计的抗冲击能力几乎达到材料本身的强度。本文通过实验的方法验证了这种加速度计能适应各种恶劣环境 。The working principle, fabrication technology for a new type of MEMS accelerometer , convective accelerometer are presented in this paper. As the accelerometer is composed of silicon cavity, heater, and temperature transducers which are fixed on both sides of the heater with equal distance, there are no moveable parts and no proof mass in the device, so ensured the anti shock property nearly perfect as the material property. The reliability experiment shows that the convective accelerometer can work well under abominable conditions. Such excellent property will make it reliable for products.

关 键 词：微机械加速度计 热对流加速度计 工作原理 制造工艺 可靠性 加速度传感器 

分 类 号：TH824.4[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]