V型电致热微驱动器的力学特性分析  

Mechanical analyzing of V-shaped cantilever electrothermal actuator

作　　者：张永宇[1] 沈雪瑾[1] 陈晓阳[1] 

机构地区：[1]上海大学机电工程与自动化学院,上海200072

出　　处：《微纳电子技术》2003年第7期80-83,共4页Micronanoelectronic Technology

基　　金：上海市科技发展基金项目 (0 111nm0 2 0 );上海市教委重点学科科研项目(970 10 4)

摘　　要：运用能量法推导并建立了一种V型悬臂粱电热微致动器的力学模型。利用该力学模型得到了致动器的力学特性 ,并且与相关的实验结果进行了对比。由理论分析和实验对比发现 。A novel mechanical model is described for predicting the static behaviour of the V shaped cantilever thermal actuator, in which the energy approach is employed. The theoretical consequence and experimental match demonstrated that the linear relationship between the thermal expansion coefficient of the material polysilicon and the temperature is no longer valid although it is correct in macroscopic view.

关 键 词：V型电致热微驱动器 力学特性 MEMS 热膨胀系数 微型机电系统 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]