MEMS运动件的芯片外机械驱动方法  

The out-of-chip mechanical method for actuating MEMS parts

作　　者：王皓[1] 姚汉民[1] 杜春雷[1] 焦玉中[1] 

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川成都610209

出　　处：《微纳电子技术》2003年第7期477-480,共4页Micronanoelectronic Technology

基　　金：中国科学院光电技术研究所领域前沿部属课题 (CK0 2 12 )资助

摘　　要：研究MEMS微结构的片外机械式驱动问题 ,介绍了在MEMS硅芯片背面贴合一块宏观尺度PZT片的驱动思想即PZT产生机械运动 ,在硅固定件与微运动件之间产生动量耦合 ,从而驱动微运动件。重点探讨脉冲驱动、振动驱动两大类基本驱动方法及其特点 ,介绍国外代表性研究结果 ,并提出对该方法进一步研究的观点与设想。A new method for actuating micro parts is introduced. A PZT plate is attached to the MEMS chip, generating mechanical movement. The momentum is transferred from silicon die to the micro part. Two kinds of base principle, actuating by pulse and actuating by vibration, were discussed in detail. The important results made by foreign researchers were introduced. The viewpoints and advices for further research were proposed.

关 键 词：MEMS 运动件 芯片 机械驱动 微结构 微机电系统 压电陶瓷 

分 类 号：TH-39[机械工程]