氢敏元件的种类及半导体薄膜材料在其中的应用  

Hydrogen sensors and semiconductor thin films in this field

作　　者：郝俊杰[1] 李龙土[1] 

机构地区：[1]清华大学材料科学与工程系新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《功能材料》2004年第1期7-10,共4页Journal of Functional Materials

基　　金：国家重点基础研究发展计划资助项目(2002CB613301);国家高技术研究发展计划(863计划)资助项目(2001AA325010)

摘　　要：　随着氢燃料电池技术在汽车应用中的日益完善,对高性能氢敏元件的需求也更加迫切。本文介绍了采用不同工作原理制备的氢敏元件的种类,着重描述了半导体薄膜材料的工作原理和改性途径,并针对我国目前研究较少的Ga2O3新型薄膜材料进行了较为详细的综合论述。With the coming use of hydrogen-driven vehicles, a highly sensitive and selective hydrogen sensor was required aiming at application like fire warning or leakage-control system. Classifications and principles of H_2 sensor were described in this paper. The mechanism of thin film hydrogen sensors was introduced thoroughly. After that the research and development of semiconductor thin film, including Ga_2O_3 new material used in hydrogen sensor were proposed.

关 键 词：半导体薄膜 氢敏元件 氢燃料电池 氧化镓 汽车 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]