NiTi/Si薄膜驱动微型无阀泵的系统研究  

Investigation of a Valveless Micropump Actuated by NiTi/ Si Diaphragm

作　　者：刘玲[1] 谢海波[1] 傅新[1] 杨华勇[1] 徐东[2] 

机构地区：[1]浙江大学流体传动及控制国家重点实验室,杭州310027 [2]上海交通大学信息存储研究中心,上海200030

出　　处：《机械科学与技术》2003年第6期920-922,共3页Mechanical Science and Technology for Aerospace Engineering

基　　金：国家自然科学基金 ( 5 0 175 0 98)资助

摘　　要：介绍了形状记忆合金 /硅 (Ni Ti/Si)复合膜驱动的微型无阀泵的结构及工作原理 ,采用 Matlab对微泵的压力 P和流量 Q进行了计算和仿真 ,并将仿真结果与实验结果进行了对比。通过分析驱动膜的驱动频率与泵的几何结构对微泵性能的影响 ,得到微泵的优化方案。In this paper, the structure and working principle of valveless micropump actuated by SMA/Si (NiTi/Si) diaphragm was introduced. Mathematic model was build and the pressure and flow rate of the micropump were simulated with Matlab. The simulation result and the experimental result were compared. The influence of the driving frequency and the geometry of the pump on the performance of the micropump was analyzed and the optimization scheme of the micropump was obtained.

关 键 词：SMA MEMS 微型无阀泵 数值计算 流量脉动 

分 类 号：TB381[一般工业技术—材料科学与工程]