铁电薄膜热释电非致冷红外传感器研究  

Investigation of Ferroelectric Thin Films Uncooled Pyroelectric Infrared Sensors

作　　者：刘梅冬[1] 陈实[1] 李元昕[1] 曾亦可[1] 姜胜林[1] 邓传益[1] 刘少波[1] 

机构地区：[1]华中科技大学电子科学与技术系,湖北武汉430074

出　　处：《仪表技术与传感器》2004年第2期3-4,28,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金重大研究计划资助项目(90201028);"863"计划新材料领域资助项目(2002AA325080)

摘　　要：阐述了铁电薄膜热释电非致冷红外传感器的工作原理,对铁电薄膜材料的要求及sol gel铁电薄膜电性能。研究了BST铁电薄膜红外传感器的制备工艺与测试方法。研制出单元和8元、9元、10元线列铁电薄膜热释电非致冷红外传感器。Working principle for ferroelectric thin films uncooled pyroelectric infrared sensors and requirements of electric properties for ferroelectric thin film materials were expounded,BST ferroelectric thin films were fabricated by improved sol-gel technology.Fabrication processing and measured method for ferroelectric thin film uncooled infrared sensors were studied.Ferroelectric thin film single element uncooled pyroelectric infrared sensors and 8,9,10 element uncooled sensing liner arrays were developed.

关 键 词：铁电薄膜 热释电效应 铁电材料 非致冷红外传感器 

分 类 号：TB39[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]