新型室温微机械红外探测器原理与设计  

Principle and Design of an IR Detector for a Novel Room Temperature MEMS

作　　者：李兰[1] 沈光地[1] 邹德恕[1] 刘铮[1] 邓军[1] 杨道虹[1] 吴畯苗[1] 

机构地区：[1]北京工业大学电子信息与控制工程学院北京光电子技术实验室,北京100022

出　　处：《光电工程》2004年第2期34-36,43,共4页Opto-Electronic Engineering

基　　金：国家自然科学基金(69976004);北京市自然科学基金(4982005)资助项目

摘　　要：利用红外吸收气体直接吸收红外辐射的原理,设计出一种新型室温红外探测器。当密闭腔 内气体吸收红外辐射后,腔内压强增大使弹性薄膜形变,由以弹性薄膜为可动极板的微电容结构的电容变化量,可测得红外辐射的大小。采用微机械技术制作的探测器,对8-14mm红外辐射有灵敏、快速的响应,灵敏度≥2×10-3 pF/mW。A room temperature IR detector is designed by using the principle of IR absorption gas directly absorbing IR radiation. After the gas within a closely sealed cavity absorbs IR radiation, the enlarged pressure intensity within the cavity makes the thin film deform. The size of IR radiation can be measured from the capacitive variation quantity of a micro-capacitance which uses the elastic thin film as movable polar plate. The detector made with MEMS technology is sensitive for 8 - 14 μm IR radiation and its sensitivity greater than or equal 2 × 10-3 pF/mW.

关 键 词：红外探测器 微机械 弹性敏感薄膜 红外吸收气体 

分 类 号：TN215[电子电信—物理电子学]