一种新型CMOS兼容湿度传感器  

A Novel Humidity Sensor Compatible with CMOS Technology

作　　者：顾磊[1] 黄庆安[1] 秦明[1] 张中平[1] 严先蔚[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《Journal of Semiconductors》2004年第2期174-178,共5页半导体学报（英文版）

摘　　要：给出了与 CMOS工艺兼容的一种新型梳齿状湿度传感器的结构、工艺流程及其测试结果 .利用 Coventor软件对这种新型结构进行了理论分析 ,对制备出的湿度传感器的性能如灵敏度、滞回特性、重复性、响应时间等进行了测试并讨论 .结果表明文中提出的 CMOS湿度传感器工艺简单、响应时间快、成本低、灵敏度高 ,有望在实际中得到应用 .A new comb structure of capacitive humidity sensor is described,which is fabricated by a standard CMOS process to achieve an effective solution for accurate and reliable humidity measurement.The structure is analyzed by using the Coventor softwave.The capacitance of RH sensor is measured and the processes of absorption and desorption are compared clearly.The measured results show that the hysteresis,repeated property,and the sensitivity of the sensor can be precisely calibrated.The result indicates also that the novel humidity sensor may be applied in practice.

关 键 词：湿度传感器 微电子机械系统 CMOS MEMS 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]