采用实心铁磁体的磁悬浮工作台的系统辨识  

Identification of the Open-loop Dynamics of a Magnetically-suspended Table Made of Solid Pure Iron

作　　者：毛军红[1] 高琳[2] 李黎川[2] 

机构地区：[1]西安交通大学机械工程学院,西安710049 [2]西安交通大学电气工程学院,西安710049

出　　处：《微细加工技术》2004年第1期62-67,80,共7页Microfabrication Technology

基　　金：国家自然科学基金资助项目(59975073)

摘　　要：在超精密磁悬浮工作台中,作为衔铁被悬浮的工作台,如果可以不采用硅钢片而直接使用实心铁磁材料,则可以大大简化加工工艺,并提高工作台的刚度,但实心铁磁材料的电涡流效应对工作台性能的影响需要由实验加以确定。针对这一问题,对一个工作台采用电工纯铁的实际系统进行了研究。实验数据及系统辨识表明,由于电涡流效应,实际物理系统的特性与理论模型有明显的差异,如果不考虑这些差异,将很难获得令人满意的控制效果。另一方面,只要对系统实施辨识,并根据辨识的结果设计磁悬浮控制器,即使采用实心铁磁材料,仍可获得良好的控制性能。In a precision magnetically-suspended table system,it is highly preferred that the table being suspended is made of solid pure iron (as opposed to laminated),which enhances stiffness and simplifies fabrication.However,it must be considerable that the effect of eddy current on the table dynamics may be not negligible and may have to be examined by experiment.This paper deals with a magnetically-suspended table system where the table is made of soft iron. It is shown by experiment data and identification that there is a big difference between a theoretical model and the real table dynamics when the effect of eddy current is not taken into account. This big difference is shown to prevent closed-loop performances by pole-placement from being achieved.A modified model is derived based on the identification,which takes into account the effect of eddy current, and support pole-placement design.As a result,good performance can still be achieved even if the table is not laminated,as long as we use identification to give an accurate model and design.

关 键 词：铁磁体 磁悬浮工作台 系统辨识 精密工作台 电涡流效应 控制性能 

分 类 号：TP27[自动化与计算机技术—检测技术与自动化装置]