通信领域中的MEMS器件及发展动态  

The Application and Development of MEMS Device in Communication Field

作　　者：谌贵辉[1] 张万里[2] 彭斌[2] 蒋洪川[2] 

机构地区：[1]西昌学院物理系,四川西昌615022 [2]电子科技大学微电子与固体电子学院,四川成都610054

出　　处：《电讯技术》2004年第2期19-24,共6页Telecommunication Engineering

摘　　要：微电子机械系统(MEMS)技术在通信领域中有着广泛的应用前景,本文介绍了在无线通信和光通信中的MEMS器件如MEMS电感、电容、开关、滤波器、光检测器等MEMS器件的原理、结构和发展概况,指出了MEMS器件发展所面临的问题和方向。Micro Electro Mechanical Systems ( MEMS ) technology have extensive application prospect in the field of communication. This paper introduces the principle,structure and general situation of the MEMS device in wireless communication and the optical fiber communication, such as MEMS inductance, capacity, switch, wave filter and smooth detector,and also points out the problems and direction faced by MEMS device development in the future .

关 键 词：MEMS 微电子机械系统 无线通信 光通信 滤波器 光检测器 电感 电容 

分 类 号：TN92[电子电信—通信与信息系统] TH-39[电子电信—信息与通信工程]